TERA LEADER / RESEARCH EQUIPMENT
Mini CVD
Compact CVD and annealing furnace with a glovebox-transferable tube module
Mini CVD is a compact split-type tube furnace with an integrated quartz-tube and flange module. Only this module is transferred into the glovebox; the furnace body is installed in an ordinary laboratory ambient environment. It supports CVD and annealing under inert or process gas atmospheres.
Confirm the applicable model, options and final specifications before ordering.
Features
- Glovebox integration: only the integrated quartz-tube and flange module is transferred into the glovebox.
- Atmosphere control: process-appropriate gases, including argon, oxygen and methane, with vacuum-pump exhaust.
- Precursor delivery: canister and bubbler methods, with up to four gas lines.
- Programmable temperature control: heating according to the selected temperature program.
- Compact CVD and annealing system for laboratory materials synthesis, deposition and heat-treatment experiments.
Specifications
| Model | TLP-1008-MF |
|---|---|
| Furnace type | Compact split-type tube furnace |
| Processes | CVD / Annealing |
| Quartz tube diameter | Ø40 mm (confirm whether this is the inner or outer diameter) |
| Quartz tube length | 400 mm |
| Glovebox-transferable assembly | Integrated quartz-tube and flange module |
| Sealing | Viton ring |
| Seal temperature limit | 150 °C (seal limit; separate from the furnace heating temperature) |
| Process gases | Argon / Oxygen / Methane, etc. |
| Maximum gas flow | 1,000 sccm (confirm whether this is per line or the total flow) |
| Gas flow control | Flow meter / MFC (optional) |
| Exhaust method | Vacuum pump |
| Precursor delivery | Canister / Bubbler |
| Gas lines | Up to 4 |
| Temperature control | Programmable control |
| Maximum heating temperature | 1100 °C (less than 1 hour) |
| Continuous heating temperature | 900 °C |
| Total heating zone length | 184 mm |
| Uniform-temperature zone | 60 mm (±1 °C) at 900 °C |
| Power Supply | AC 220 V |
| Power consumption | 2 kW |
| Furnace installation environment | Ordinary laboratory ambient environment |
Confirm the final model-specific specification and options before ordering.
Options
- Vacuum Gauge
- MFC (with Digital Read-out Unit)
- Vacuum pump
Applications
- Thermal Annealing
- Chemical Vapor Deposition
Product images
Manuals & technical documents
No public downloads are listed for this product. Contact us for applicable documents.