TERA LEADER / RESEARCH EQUIPMENT
Mini CVD
Compact tube furnace for CVD and thermal annealing experiments
Equipment image
Specifications
- Model
- TLP-1008-MF
- Furnace type
- Compact split-type tube furnace
- Processes
- CVD / Annealing
- Quartz tube diameter
- Ø40 mm (confirm whether this is the inner or outer diameter)
- Quartz tube length
- 400 mm
- Glovebox-transferable assembly
- Integrated quartz-tube and flange module
- Sealing
- Viton ring
- Seal temperature limit
- 150 °C (seal limit; separate from the furnace heating temperature)
- Process gases
- Argon / Oxygen / Methane, etc.
- Maximum gas flow
- 1,000 sccm (confirm whether this is per line or the total flow)
- Gas flow control
- Flow meter / MFC (optional)
- Exhaust method
- Vacuum pump
- Precursor delivery
- Canister / Bubbler
- Gas lines
- Up to 4
- Temperature control
- Programmable control
- Maximum heating temperature
- 1100 °C (less than 1 hour)
- Continuous heating temperature
- 900 °C
- Total heating zone length
- 184 mm
- Uniform-temperature zone
- 60 mm (±1 °C) at 900 °C
- Power Supply
- AC 220 V
- Power consumption
- 2 kW
- Furnace installation environment
- Ordinary laboratory ambient environment
Research fields
- Advanced materials, thermal & surface processing, joining
- Energy materials synthesis & analysis
- Advanced batteries & solid-state cells
Topics for technical consultation
- Target materials, sample characteristics and research objectives.
- Required functions, control and data integration.
- Installation conditions and target schedule.
Our R&D equipment pages present accumulated development experience. New requests are reviewed for technical fit, development scope and available resources before acceptance.
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